{"id":188,"date":"2009-01-29T16:14:05","date_gmt":"2009-01-30T00:14:05","guid":{"rendered":"http:\/\/betasights.net\/wordpress\/?p=188"},"modified":"2009-01-29T16:14:05","modified_gmt":"2009-01-30T00:14:05","slug":"aixtron-and-ovonyx-partner-for-pcm-deposition","status":"publish","type":"post","link":"http:\/\/www.betasights.net\/wordpress\/?p=188","title":{"rendered":"Aixtron and Ovonyx partner for PCM deposition"},"content":{"rendered":"<p><a href=\"http:\/\/www.aixtron.com\/\" target=\"_blank\">Aixtron<\/a> and <a href=\"http:\/\/www.ovonyx.com\/\" target=\"_blank\">Ovonyx<\/a> announced a <a href=\"http:\/\/aixtron.de\/index.php?id=312&amp;L=1&amp;tx_ttnews[tt_news]=981&amp;tx_ttnews[backPid]=178&amp;cHash=0667c609fe\" target=\"_blank\">JDP for Atomic Vapor Deposition (AVD\u00ae) process technology to push scaling of next-generation phase change memory (PCM) products<\/a>. Since it is expected to replace current high-density memory, PCM cells must be made dense and so companies like Samsung (<em>Ref: BetaSights Newsletter 0001<\/em>) and <a href=\"http:\/\/www.semiconductor.net\/article\/CA6621100.html\" target=\"_blank\">Numonyx<\/a> require CVD-like processes for gap-fill instead of planar PVD.<\/p>\n<p>Ovonyx works to commercialize its proprietary phase-change semiconductor memory technology originally invented at <a href=\"http:\/\/www.ovonic.com\/fo_ecd_ovonics_history.cfm\" target=\"_blank\">Energy Conversion Devices<\/a>. \u201cAixtron\u2019s leading market position in thin-film deposition equipment for the semiconductor industry provides an excellent platform for the competitive development of new phase change material by AVD technique for next-generation, high-density confined cell PCM device structures,\u201d said Tyler Lowrey, President and Chief Executive Officer of Ovonyx.<\/p>\n<div id=\"attachment_198\" style=\"width: 154px\" class=\"wp-caption alignleft\"><a href=\"http:\/\/betasights.net\/wordpress\/wp-content\/uploads\/2009\/01\/aix-tricent_chuck22.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-198\" class=\"size-full wp-image-198\" title=\"aix-tricent_chuck22\" src=\"http:\/\/betasights.net\/wordpress\/wp-content\/uploads\/2009\/01\/aix-tricent_chuck22.jpg\" alt=\"Tricent AVD chamber (source: Aixtron)\" width=\"144\" height=\"144\" \/><\/a><p id=\"caption-attachment-198\" class=\"wp-caption-text\">Tricent AVD chamber (source: Aixtron)<\/p><\/div>\n<p>AVD is part of the portfolio of vapor-based deposition technologies held by Aixtron that allows for atomic-scale control of functional electronic materials. <a href=\"http:\/\/www.aixtron.com\/press\/pr-email-trijet.htm\" target=\"_blank\">Aixtron\u2019s exclusive TriJet vaporizer\u2014core technology acquired in 2000<\/a>\u2014can handle precursors up to 300\u00b0C with pulsed injection. The single-wafer showerhead chamber (<em>see Figure<\/em>) can thus be supplied with a wide variety of precursors, including those with high-viscosity requiring temperatures over 200\u00b0C (the typical upper limit for conventional gas distribution systems) for necessary flow.<\/p>\n<p>At <a href=\"http:\/\/www.semi.org\/en\/P033705\" target=\"_blank\">SEMI\u2019s SBC<\/a> this year, <a href=\"http:\/\/betasights.net\/wordpress\/?p=116\" target=\"_blank\">Praxair indicated that there are currently ~25 companies proving ALD precursors<\/a>. IDMs thus have a wide variety of materials to test, and Aixtron\u2019s AVD tool allows for a wide temperature window to not eliminate precursor options. For the distant future, the company is already working with some IDMs on the feasibility of using alternate channel materials (III-V and II-VI) on Si wafers. An Aixtron spokesperson contacted by BetaSights stated that the company has already delivered multiple AVD tools for PCM beta process development to customers. <em>\u2013E.K.<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Aixtron and Ovonyx announced a JDP for Atomic Vapor Deposition (AVD\u00ae) process technology to push scaling of next-generation phase change memory (PCM) products. Since it is expected to replace current high-density memory, PCM cells must be made dense and so companies like Samsung (Ref: BetaSights Newsletter 0001) and Numonyx require CVD-like processes for gap-fill instead [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[9,3,4,10,8],"tags":[43,129,112,97,105,42,130,127,128],"class_list":["post-188","post","type-post","status-publish","format-standard","hentry","category-equipment","category-manufacturing-fabrication-line","category-integrated-circuit","category-material","category-market-segment","tag-ald","tag-chamber","tag-cvd","tag-memory","tag-pcm","tag-precursor","tag-pvd","tag-si","tag-vapor"],"_links":{"self":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/188","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=188"}],"version-history":[{"count":9,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/188\/revisions"}],"predecessor-version":[{"id":200,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/188\/revisions\/200"}],"wp:attachment":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=188"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=188"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=188"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}