{"id":357,"date":"2009-02-20T18:02:57","date_gmt":"2009-02-21T02:02:57","guid":{"rendered":"http:\/\/betasights.net\/wordpress\/?p=357"},"modified":"2009-02-22T22:52:33","modified_gmt":"2009-02-23T06:52:33","slug":"independent-computational-lithography-simulator","status":"publish","type":"post","link":"http:\/\/www.betasights.net\/wordpress\/?p=357","title":{"rendered":"Independent computational lithography simulator"},"content":{"rendered":"<p>As <a href=\"http:\/\/en.wikipedia.org\/wiki\/Computational_lithography\" target=\"_blank\">computational lithography<\/a> has become big big business, the pioneering enterprises have been assimilated into larger organizations (<a href=\"http:\/\/www.kla-tencor.com\/corporate-releases\/kla-tencor-to-acquire-finle-technologies-developer-of-industry-standard-lithography-modeling-and-analysis-software.html\" target=\"_blank\">KLA-Tencor for Finle<\/a> and <a href=\"http:\/\/www.edn.com\/blog\/1480000148\/post\/110004011.html\" target=\"_blank\">Synopsys for Sigma-C<\/a>, to name two examples). <a href=\"http:\/\/www.panoramictech.com\/\" target=\"_blank\">Panoramic Technology<\/a>, however, continues its independence, supplying trustworthy and up-to-date simulators to advanced lithographers for a decade. Past Panoramic products, however, employed an interface that was familiar to users of <a href=\"http:\/\/cuervo.eecs.berkeley.edu\/Volcano\/www\/about.html\" target=\"_blank\">SPLAT and TEMPEST at the University of California, Berkeley<\/a>, but seemed difficult to those who had not grown up with it.<\/p>\n<p><a href=\"http:\/\/betasights.net\/wordpress\/wp-content\/uploads\/2009\/02\/hyperlith-simulation-gui1.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-370 alignright\" style=\"margin: 6px;\" title=\"hyperlith-simulation-gui1\" src=\"http:\/\/betasights.net\/wordpress\/wp-content\/uploads\/2009\/02\/hyperlith-simulation-gui1.jpg\" alt=\"\" width=\"193\" height=\"123\" \/><\/a>Now, with the new HyperLith simulator, Panoramic believes that that it has created the most easy-to-use and intuitive lithography simulator interface available. Tom Pistor, president and CEO of Panoramic claims even a casual or occasional user can set up a simulation in a few minutes and begin generating accurate and meaningful results. Both the setup GUI (<em>see figure<\/em>) and the presentation of the simulation output are comprehensive and intuitive, according to Pistor.<\/p>\n<p>True to its roots, the new tool sacrifices nothing in terms of speed, power and flexibility:<br \/>\n*EUV, DUV, immersion capability,<br \/>\n*Kirchhoff or rigorous\/TEMPEST mask modeling options,<br \/>\n*Full-vector aerial imaging with polarization control,<br \/>\n*DAIM, or physics-based resist modeling,<br \/>\n*Powerful post-processing, analysis and measurement tools,<br \/>\n*Powerful batching capabilities,<br \/>\n*Distributed computing\/parallel processing with SimRunner,<br \/>\n*Full cross-platform compatibility (32\/64 bit Windows XP, Vista, Linux), and<br \/>\n*Hardware acceleration available.<\/p>\n<p>Panoramic claims to be selling HyperLith at a fraction of the price of comparable products, maintaining the valued tradition of making computational lithography accessible to individuals, small companies and students. Since the Panoramic simulator stands alone &#8211; and is not optimized for any <a href=\"http:\/\/ieeexplore.ieee.org\/xpl\/freeabs_all.jsp?arnumber=1688902\" target=\"_blank\">OPC<\/a> package or style &#8211; it can be used as a standard against which faster, but less rigorous algorithms from different vendors can be tested. <em>-M.D.L.<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>As computational lithography has become big big business, the pioneering enterprises have been assimilated into larger organizations (KLA-Tencor for Finle and Synopsys for Sigma-C, to name two examples). Panoramic Technology, however, continues its independence, supplying trustworthy and up-to-date simulators to advanced lithographers for a decade. Past Panoramic products, however, employed an interface that was familiar [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3,4,8,11],"tags":[176,79,177,466,165,178,179],"class_list":["post-357","post","type-post","status-publish","format-standard","hentry","category-manufacturing-fabrication-line","category-integrated-circuit","category-market-segment","category-service","tag-duv","tag-euv","tag-i193","tag-integrated-circuit","tag-litho","tag-model","tag-opc"],"_links":{"self":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/357","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=357"}],"version-history":[{"count":14,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/357\/revisions"}],"predecessor-version":[{"id":363,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/357\/revisions\/363"}],"wp:attachment":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=357"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=357"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=357"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}