{"id":642,"date":"2009-04-01T22:46:44","date_gmt":"2009-04-02T06:46:44","guid":{"rendered":"http:\/\/www.betasights.net\/wordpress\/?p=642"},"modified":"2009-04-01T22:46:44","modified_gmt":"2009-04-02T06:46:44","slug":"asahi-glass-photo-sod","status":"publish","type":"post","link":"http:\/\/www.betasights.net\/wordpress\/?p=642","title":{"rendered":"Asahi Glass photo-SOD"},"content":{"rendered":"<p><a href=\"http:\/\/www.agc.co.jp\/\" target=\"_blank\">Asahi Glass<\/a> is promoting a family of new photosensitive spin-on-dielectric (SOD) films for fan-out WLP and 3D packages, as well as for FPD and MEMS applications. <a href=\"http:\/\/www.agc.co.jp\/english\/products\/semiconductor\/Low-k_02.html\" target=\"_blank\">The Chemicals Fluoroproducts Division of Asahi Glass has successfully developed the AL-X polymer series<\/a>, primarily targeting the redistribution\/rewiring layers in fan-out WLP packages. The company will begin production of the AL-X fluoropolymer dielectric precursor at its Chiba Plant (Japan), with marketing operations of the product already started in January 2009.<\/p>\n<p><a href=\"http:\/\/www.betasights.net\/wordpress\/wp-content\/uploads\/2009\/04\/asahiglass_al-x1.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright size-full wp-image-645\" title=\"asahiglass_al-x1\" src=\"http:\/\/www.betasights.net\/wordpress\/wp-content\/uploads\/2009\/04\/asahiglass_al-x1.jpg\" alt=\"\" width=\"217\" height=\"181\" \/><\/a>Mechanical properties of the final film include elongation of 20% and Young\u2019s modulus of 1.3GPa, so this is a relatively soft and \u201crubbery\u201d dielectric. The dielectric constant (k) is 2.6-2.7 (@1MHz-1GHz). The precursor is formulated in different viscosity blends so that three different final film thickness ranges can be achieved: 1.5-3.5\u00b5m, 3.5-10\u00b5m, and 8-30\u00b5m. Using the thickest viscosity spun to 15\u00b5m film thickness, 9 \u00b5m lines and spaces have been patterned with decent sidewall angles (<em>see figure<\/em>).<\/p>\n<p>The precursor reportedly planarizes quite well over micron-scale topography. The basic process flow after spin coating the polymer is as follows:<br \/>\n\u2022 Soft bake for 90s at 80C,<br \/>\n\u2022 Expose with i-line using negative mask,<br \/>\n\u2022 Develop and rinse in solvent, and<br \/>\n\u2022 Hard bake at 180-250C.<\/p>\n<p>Integration work on WLP using this material will be done by Asahi Glass in cooperation with <a href=\"http:\/\/www.rti.org\/\" target=\"_blank\">RTI International<\/a> in Research Triangle Park, North Carolina (U.S.) which has successfully developed processing guidelines for the new dielectric film. The material may also see use as a wafer bonding material for MEMS, and there is also a high transparency version for application as the interlayer dielectric for flat panel displays (FPD). More on spin-on dielectrics in the next BetaSights <a href=\"http:\/\/www.betasights.net\/newsletter.php\" target=\"_self\">Newsletter<\/a>. <em>\u2013E.K.<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Asahi Glass is promoting a family of new photosensitive spin-on-dielectric (SOD) films for fan-out WLP and 3D packages, as well as for FPD and MEMS applications. The Chemicals Fluoroproducts Division of Asahi Glass has successfully developed the AL-X polymer series, primarily targeting the redistribution\/rewiring layers in fan-out WLP packages. The company will begin production of [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3,5,4,10,6,8],"tags":[78,467,466,165,171,471,468,142,245,244,172,200],"class_list":["post-642","post","type-post","status-publish","format-standard","hentry","category-manufacturing-fabrication-line","category-flat-panel-display","category-integrated-circuit","category-material","category-micro-electro-mechanical-system","category-market-segment","tag-3d","tag-flat-panel-display","tag-integrated-circuit","tag-litho","tag-low-k","tag-material","tag-micro-electro-mechanical-system","tag-package","tag-photo-sod","tag-sod","tag-spin-on","tag-wlp"],"_links":{"self":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/642","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=642"}],"version-history":[{"count":4,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/642\/revisions"}],"predecessor-version":[{"id":648,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=\/wp\/v2\/posts\/642\/revisions\/648"}],"wp:attachment":[{"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=642"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=642"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.betasights.net\/wordpress\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=642"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}